Rotarex RX04 / RX08
Phynox diaphragm / 超高纯气体隔膜阀
Imported Phynox R30003 Precision StripFor Semiconductor UHP Valve Diaphragms
Explore the material demands of semiconductor UHP diaphragm valves and the supply of imported Phynox R30003 precision strip.
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UHP Valve Diaphragm Requirements
UHP diaphragm valves require corrosion resistance, elastic recovery, fatigue performance, controlled sealing surfaces and low particle contamination.
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How Phynox R30003 Fits
Phynox (UNS R30003) is a high-elasticity Co-Cr-Ni-Mo alloy. Its annealed tensile strength is approximately 900 MPa; precision cold rolling can raise tensile strength above 1,900 MPa. Subsequent aging at approximately 520°C for three hours provides further strengthening, with ultimate tensile strength reaching approximately 2,500 MPa in highly strengthened conditions. Excellent corrosion and hydrogen-embrittlement resistance, elastic recovery and fatigue performance make it well suited to repeatedly flexing semiconductor UHP valve diaphragms.
Surface comparison: standard finish (left) and mirror-polished finish (right)
Surface comparison: standard finish (left) and mirror-polished finish (right)
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International Manufacturer Example
Published international high-purity valve documentation identifies Phynox and UNS R30003 Co-Cr-Ni alloys for precision metal diaphragms.
AP Tech
Co-Cr-Ni diaphragm alloy; UNS R30003 material identification confirmed for the relevant application / 高纯阀门膜片技术参考
04u-Flex: Imported R30003 precision strip for semiconductor UHP valve diaphragms
u-Flex: Imported R30003 precision strip for semiconductor UHP valve diaphragms
Proven mechanical specification and mirror-finish surface
We supply R30003 diaphragm strip to an established proprietary mechanical-property specification developed through extensive semiconductor UHP valve application experience.
Thickness / 厚度0.030–1.000 mm
Width / 宽度1.5–200 mm
Key capability
Typical supplied diaphragm-grade surface roughness: Ra ≤ 0.07 μm. Continuously mirror-polished strip is available before forming. Our proven proprietary specification covers tensile strength, hardness, elongation and delivery condition. Contact us for recommended mechanical properties and a supply solution.
Supply capability
Delivery specifications cover temper, dimensional tolerance, slit-edge quality and strip surface condition. Thickness-width combinations follow the applicable product specifications.